Simulation of ion flux distribution in conductive and nonconductive nanotip patterns

Levchenko, I. & Ostrikov, K. (2006) Simulation of ion flux distribution in conductive and nonconductive nanotip patterns. International Journal of Nanoscience, 5(4-5), pp. 621-626.

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The distribution of flux of carbon-bearing cations over nanopatterned surfaces with conductive nanotips and nonconductive nanoislands is simulated using the Monte-Carlo technique. It is shown that the ion current is focused to nanotip surfaces when the negative substrate bias is low and only slightly perturbed at higher substrate biases. In the low-bias case, the mean horizontal ion displacement caused by the nanotip electric field exceeds 10 nm. However, at higher substrate biases, this value reduces down to 2 nm. In the nonconductive nanopattern case, the ion current distribution is highly nonuniform, with distinctive zones of depleted current density around the nanoislands. The simulation results suggest the efficient means to control ion fluxes in plasma-aided nanofabrication of ordered nanopatterns, such as nanotip microemitter structures and quantum dot or nanoparticle arrays. © World Scientific Publishing Company.

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ID Code: 74106
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Carbon nanotips, Monte-Carlo simulation, Nanoislands, Nanopatterned surfaces
DOI: 10.1142/S0219581X06004887
ISSN: 0219-581X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2006 World Scientific Publishing
Deposited On: 17 Jul 2014 23:25
Last Modified: 22 Jun 2017 01:01

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