Numerical simulation of self-organized nano-islands in plasma-based assembly of quantum dot arrays

Levchenko, Igor & Ostrikov, Kostya (2005) Numerical simulation of self-organized nano-islands in plasma-based assembly of quantum dot arrays. Proceedings of SPIE, 6039.

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Abstract

This work presents the details of the numerical model used in simulation of self-organization of nano-islands on solid surfaces in plasma-assisted assembly of quantum dot structures. The model includes the near-substrate non-neutral layer (plasma sheath) and a nanostructured solid deposition surface and accounts for the incoming flux of and energy of ions from the plasma, surface temperature-controlled adatom migration about the surface, adatom collisions with other adatoms and nano-islands, adatom inflow to the growing nano-islands from the plasma and from the two-dimensional vapour on the surface, and particle evaporation to the ambient space and the two-dimensional vapour. The differences in surface concentrations of adatoms in different areas within the quantum dot pattern significantly affect the self-organization of the nano-islands. The model allows one to formulate the conditions when certain islands grow, and certain ones shrink or even dissolve and relate them to the process control parameters. Surface coverage by selforganized quantum dots obtained from numerical simulation appears to be in reasonable agreement with the available experimental results.

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ID Code: 74107
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Adatoms, Complex systems, Nanoassembly, Quantum dots, Self-organization
DOI: 10.1117/12.638237
ISSN: 0277-786X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 17 Jul 2014 03:40
Last Modified: 18 Jul 2014 00:23

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