Plasma-aided nanofabrication: "plasma-building block" approach

Ostrikov, K. & Xu, S. (2006) Plasma-aided nanofabrication: "plasma-building block" approach. International Journal of Nanoscience, 5(4-5), pp. 439-444.

View at publisher (open access)


Unique features and benefits of the plasma-aided nanofabrication are considered by using the "plasma-building block" approach, which is based on plasma diagnostics and nanofilm characterization, cross-referenced by numerical simulation of generation and dynamics of building blocks in the gas phase, their interaction with nanostructured surfaces, and ab initio simulation of chemical structure of relevant nanoassemblies. The examples include carbon nanotip microemitter structures, semiconductor quantum dots and nanowires synthesized in the integrated plasma-aided nanofabrication facility.

Impact and interest:

0 citations in Scopus
Search Google Scholar™

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 74108
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Nanofabrication, Nanostructured materials, Reactive plasma
DOI: 10.1142/S0219581X06004607
ISSN: 0219-581X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2006 World Scientific Publishing
Deposited On: 17 Jul 2014 23:34
Last Modified: 21 Jul 2014 00:53

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page