Plasma-aided nanofabrication: "plasma-building block" approach
Ostrikov, K. & Xu, S. (2006) Plasma-aided nanofabrication: "plasma-building block" approach. International Journal of Nanoscience, 5(4-5), pp. 439-444.
Unique features and benefits of the plasma-aided nanofabrication are considered by using the "plasma-building block" approach, which is based on plasma diagnostics and nanofilm characterization, cross-referenced by numerical simulation of generation and dynamics of building blocks in the gas phase, their interaction with nanostructured surfaces, and ab initio simulation of chemical structure of relevant nanoassemblies. The examples include carbon nanotip microemitter structures, semiconductor quantum dots and nanowires synthesized in the integrated plasma-aided nanofabrication facility.
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|Item Type:||Journal Article|
|Keywords:||Nanofabrication, Nanostructured materials, Reactive plasma|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Copyright Owner:||Copyright 2006 World Scientific Publishing|
|Deposited On:||17 Jul 2014 23:34|
|Last Modified:||21 Jul 2014 00:53|
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