Electrostatic nanoparticle filter for atomic scale fabrication in low-temperature plasmas
Rutkevych, P.P., Ostrikov, K., & Xu, S. (2006) Electrostatic nanoparticle filter for atomic scale fabrication in low-temperature plasmas. International Journal of Nanoscience, 5(4-5), pp. 465-469.
The means of reducing nanoparticle contamination in the synthesis of carbon nanostructures in reactive Ar + H2 + CH4 plasmas are studied. It is shown that by combining the electrostatic filtering and thermophoretic manipulation of nanoparticles, one can significantly improve the quality of carbon nanopatterns. By increasing the substrate heating power, one can increase the size of deposited nanoparticles and eventually achieve nanoparticle-free nanoassemblies. This approach is generic and is applicable to other reactive plasma-aided nanofabrication processes.
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|Item Type:||Journal Article|
|Keywords:||Deposition technique, Nanoparticle manipulation, Nanostructures|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Copyright Owner:||Copyright 2006 World Scientific Publishing|
|Deposited On:||17 Jul 2014 23:30|
|Last Modified:||21 Jul 2014 00:56|
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