Electrostatic nanoparticle filter for atomic scale fabrication in low-temperature plasmas

Rutkevych, P.P., Ostrikov, K., & Xu, S. (2006) Electrostatic nanoparticle filter for atomic scale fabrication in low-temperature plasmas. International Journal of Nanoscience, 5(4-5), pp. 465-469.

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Abstract

The means of reducing nanoparticle contamination in the synthesis of carbon nanostructures in reactive Ar + H2 + CH4 plasmas are studied. It is shown that by combining the electrostatic filtering and thermophoretic manipulation of nanoparticles, one can significantly improve the quality of carbon nanopatterns. By increasing the substrate heating power, one can increase the size of deposited nanoparticles and eventually achieve nanoparticle-free nanoassemblies. This approach is generic and is applicable to other reactive plasma-aided nanofabrication processes.

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1 citations in Scopus
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ID Code: 74110
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Deposition technique, Nanoparticle manipulation, Nanostructures
DOI: 10.1142/S0219581X06004644
ISSN: 0219-581X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2006 World Scientific Publishing
Deposited On: 17 Jul 2014 23:30
Last Modified: 21 Jul 2014 00:56

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