Synthesis and structural properties of Al-C-N-O composite thin films

Ning, Jiang, Xu, S., Ostrikov, K., Chai, Jianwei, Li, Yinan, Koh, Mei Ling, & Lee, S. (2001) Synthesis and structural properties of Al-C-N-O composite thin films. Thin Solid Films, 385(1-2), pp. 55-60.

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Al-C-N-O composite thin films have been synthesized by radio frequency reactive diode sputtering of an aluminum target in plasmas of N2+O2+CH4 gas mixtures. The chemical structure and composition of the films have been investigated by means of infrared and X-ray photoelectron spectroscopy. The results reveal the formation of C-N, Al-C, Al-N and Al-O bonds. The X-ray diffraction pattern suggests that the films are of nanometer composite material and contain predominately crystalline grains of hexagonal AlN and α-Al2O3. A good thermal stability of the composite has been confirmed by the annealing treatment at temperatures up to 600 °C.

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ID Code: 74120
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1016/S0040-6090(00)01923-4
ISSN: 0040-6090
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 20 Jul 2014 23:44
Last Modified: 20 Jul 2014 23:44

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