Tailoring of ion species composition in complex plasmas with charge exchange collisions

Ostrikov, K. (2005) Tailoring of ion species composition in complex plasmas with charge exchange collisions. Physics of Plasmas, 12(6), 062105-1.

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Abstract

A generic approach towards tailoring of ion species composition in reactive plasmas used for nanofabrication of various functional nanofilms and nanoassemblies, based on a simplified model of a parallel-plate rf discharge, is proposed. The model includes an idealized reactive plasma containing two neutral and two ionic species interacting via charge exchange collisions in the presence of a microdispersed solid component. It is shown that the number densities of the desired ionic species can be efficiently managed by adjusting the dilution of the working gas in a buffer gas, rates of electron impact ionization, losses of plasma species on the discharge walls, and surfaces of fine particles, charge exchange rates, and efficiency of three-body recombination processes in the plasma bulk. The results are relevant to the plasma-aided nanomanufacturing of ordered patterns of carbon nanotip and nanopyramid microemitters.

Impact and interest:

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ID Code: 74152
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.1925547
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2005 American Institute of Physics
Deposited On: 21 Jul 2014 01:36
Last Modified: 21 Jul 2014 23:48

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