Nanoparticle manipulation in the near-substrate areas of low-temperature, high-density rf plasmas

Rutkevych, P.P., Ostrikov, K., & Xu, S. (2005) Nanoparticle manipulation in the near-substrate areas of low-temperature, high-density rf plasmas. Physics of Plasmas, 12(10), pp. 103507-1.

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Manipulation of a single nanoparticle in the near-substrate areas of high-density plasmas of low-temperature glow discharges is studied. It is shown that the nanoparticles can be efficiently manipulated by the thermophoretic force controlled by external heating of the substrate stage. Particle deposition onto or repulsion from nanostructured carbon surfaces critically depends on the values of the neutral gas temperature gradient in the near-substrate areas, which is directly measured in situ in different heating regimes by originally developed temperature gradient probe. The measured values of the near-surface temperature gradient are used in the numerical model of nanoparticle dynamics in a variable-length presheath. Specific conditions enabling the nanoparticle to overcome the repulsive potential and deposit on the substrate during the discharge operation are investigated. The results are relevant to fabrication of various nanostructured films employing structural incorporation of the plasma-grown nanoparticles, in particular, to nanoparticle deposition in the plasma-enhanced chemical-vapor deposition of carbon nanostructures in hydrocarbon-based plasmas.

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9 citations in Scopus
9 citations in Web of Science®
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ID Code: 74159
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.2102868
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2005 American Institute of Physics
Deposited On: 21 Jul 2014 01:22
Last Modified: 22 Jun 2017 01:02

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