Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas
Ostrikov, K., Xu, S., & Shafiul Azam, A.B.M. (2002) Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas. Journal of Vacuum Science & Technology A, 20(1), pp. 251-264.
An attempt was made to investigate the optical emission spectra of atomic, molecular, and ionic species in low-frequency, high-density ICP discharges in pure nitrogen, ar con gases, and gas mixtures Ar+H2, N2+Ar, and N2+H2. The excited species were identified by in situ optical emission intensity (OEI) measurements in the discharge chamber. In general, significant results were obtained.
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|Item Type:||Journal Article|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Deposited On:||21 Jul 2014 03:39|
|Last Modified:||21 Jul 2014 03:39|
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