Reactive species in RF plasma sputtering deposition of nanocrystalline calcium phosphate bio-active films

Xu, S., Long, J.D., Ostrikov, K., & Foo, H.Y. (2003) Reactive species in RF plasma sputtering deposition of nanocrystalline calcium phosphate bio-active films. Key Engineering Materials, 240-242, pp. 307-310.

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Optical emission of reactive plasma species during the synthesis of functionally graded calcium phosphate-based bioactive films has been investigated. The coatings have been deposited on Ti-6Al-4V orthopedic alloy by co-sputtering of hydroxyapatite (HA) and titanium targets in reactive plasmas of Ar + H2O gas mixtures. The species, responsible for the Ca-P-Ti film growth have been non-intrusively monitored in situ by a high-resolution optical emission spectroscopy (OES). It is revealed that the optical emission originating from CaO species dominates throughout the deposition process. The intensities of CaO, PO and CaPO species are strongly affected by variations of the operating pressure, applied RF power, and DC substrate bias. The optical emission intensity (OEI) of reaction species can efficiently be controlled by addition of H2O reactant.

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ID Code: 74183
Item Type: Journal Article
Refereed: Yes
Additional Information: Proceedings of the 15th International Symposium on Ceramics in Medicine; The Annual Meeting of the International Society for Ceramics in Medicine; Sydney, NSW; Australia; 4-8 December 2002
Additional URLs:
Keywords: Bioceramic, Calcium phosphate, Optical emission, RF sputtering deposition
DOI: 10.4028/
ISSN: 1013-9826
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 21 Jul 2014 03:20
Last Modified: 21 Jul 2014 03:20

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