Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

Ostrikov, K., Tsakadze, E., Xu, S., Vladimirov, S.V., & Storer, R. (2003) Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas. Physics of Plasmas, 10(4), pp. 1146-1151.

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Abstract

Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (∼500) inductively coupled plasmas (ICP) were measured using miniature magnetic probes. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source was proposed. Because of apparent similarity in the procedure of derivation of the pondermotive force-caused nonlinear terms, pronounced generation of the nonlinear static azimuthal magnetic field could be expected.

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8 citations in Scopus
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5 citations in Web of Science®

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16 since deposited on 21 Jul 2014
4 in the past twelve months

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ID Code: 74189
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.1557871
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2003 American Institute of Physics
Deposited On: 21 Jul 2014 01:56
Last Modified: 21 Jul 2014 01:56

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