Hysteresis and mode transitions in a low-frequency inductively coupled plasma
Xu, S., Ostrikov, K., Luo, W., & Lee, S. (2000) Hysteresis and mode transitions in a low-frequency inductively coupled plasma. Journal of Vacuum Science & Technology A, 18(5), pp. 2185-2197.
The performance of the 500 KHz planar-coil inductively coupled plasma source was studied. The global electrical characteristics of the discharge, distributions of the induced electromagnetic fields, plasma density, potential, and electron temperature were investigated. Achieved high plasma density and low electron temperature implied that the studied plasma source was promising for industrial applications.
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|Item Type:||Journal Article|
|Keywords:||Plasma temperature, Inductively coupled plasma, Cyclotron resonances|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Deposited On:||21 Jul 2014 05:08|
|Last Modified:||21 Jul 2014 05:08|
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