Hysteresis and mode transitions in a low-frequency inductively coupled plasma

Xu, S., Ostrikov, K., Luo, W., & Lee, S. (2000) Hysteresis and mode transitions in a low-frequency inductively coupled plasma. Journal of Vacuum Science & Technology A, 18(5), pp. 2185-2197.

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The performance of the 500 KHz planar-coil inductively coupled plasma source was studied. The global electrical characteristics of the discharge, distributions of the induced electromagnetic fields, plasma density, potential, and electron temperature were investigated. Achieved high plasma density and low electron temperature implied that the studied plasma source was promising for industrial applications.

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ID Code: 74203
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Plasma temperature, Inductively coupled plasma, Cyclotron resonances
DOI: 10.1116/1.1286142
ISSN: 0734-2101
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 21 Jul 2014 05:08
Last Modified: 21 Jul 2014 05:08

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