Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas

Huang, S. Y., Cheng, Q. J., Xu, S., Wei, D. Y., Zhou, H. P., Long, J. D., Levchenko, I., & Ostrikov, K. (2012) Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas. Journal of Applied Physics, 111(3), 036101.

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An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications.

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8 citations in Scopus
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8 citations in Web of Science®

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ID Code: 74701
Item Type: Journal Article
Refereed: Yes
DOI: 10.1063/1.3673593
ISSN: 00218979
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2012 American Institute of Physics.
Deposited On: 04 Aug 2014 22:56
Last Modified: 06 Aug 2014 10:03

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