Nanoscale texture on glass and titanium substrates by physical vapor deposition process

Yarlagadda, Prasad K.D.V., Tesfamichael, Tuquabo, Schuetz, Michael, Valiveti, Lalitsuri, & Li, Tong (2014) Nanoscale texture on glass and titanium substrates by physical vapor deposition process. Procedia Engineering, 97, pp. 1506-1511.

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The aim of the paper is to give a feasibility study on the material deposition of Nanoscale textured morphology of titanium and titanium oxide layers on titanium and glass substrates. As a recent development in nanoscale deposition, Physical Vapor Deposition (PVD) based DC magnetron sputtering has been the choice for the deposition process. The nanoscale morphology and surface roughness of the samples have been characterized using Atomic Force Microscope (AFM). The surface roughnesses obtained from AFM have been compared using surface profiler. From the results we can say that the roughness values are dependent on the surface roughness of the substrate. The glass substrate was relatively smoother than the titanium plate and hence lower layer roughness was obtained. From AFM a unique nano-pattern of a boomerang shaped titanium oxide layer on glass substrate have been obtained. The boomerang shaped nano-scale pattern was found to be smaller when the layer was deposited at higher sputtering power. This indicated that the morphology of the deposited titanium oxide layer has been influenced by the sputtering power.

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ID Code: 79853
Item Type: Journal Article
Refereed: Yes
Additional Information: Publication for 12th Global Congress on Manufacturing and Management" GCMM - 2014
Additional URLs:
Keywords: Nanoscale texture, PVD sputtering, Atomic Force Microscope
DOI: 10.1016/j.proeng.2014.12.434
ISSN: 1877-7058
Divisions: Current > Institutes > Institute of Health and Biomedical Innovation
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2014 The Authors.
Copyright Statement: This is an open access article under the CC BY-NC-ND license
Deposited On: 08 Jan 2015 02:48
Last Modified: 23 Jun 2017 15:02

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