Low voltage EPMA: Experiments on a new frontier in microanalysis—analytical spatial resolution

Fournelle, J., Cathey, H., Pinard, P.T., & Richter, S. (2016) Low voltage EPMA: Experiments on a new frontier in microanalysis—analytical spatial resolution. In IOP Conference Series: Material Science and Engineering, IOP Publishing Ltd, Portoroz, Slovenia, Article Number: 012003.

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Abstract

Field emission (FE) electron gun sources provide new capabilities for high lateral resolution EPMA. The determination of analytical lateral resolution is not as straightforward as that for electron microscopy imaging. Results from two sets of experiments to determine the actual lateral resolution for accurate EPMA are presented for Kα X-ray lines of Si and Al and Lα of Fe at 5 and 7 keV in a silicate glass. These results are compared to theoretical predictions and Monte Carlo simulations of analytical lateral resolution. The experiments suggest little is gained in lateral resolution by dropping from 7 to 5 keV in EPMA of this silicate glass.

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ID Code: 85657
Item Type: Conference Paper
Refereed: Yes
DOI: 10.1088/1757-899X/109/1/012003
Subjects: Australian and New Zealand Standard Research Classification > CHEMICAL SCIENCE (030000) > ANALYTICAL CHEMISTRY (030100) > Analytical Spectrometry (030101)
Australian and New Zealand Standard Research Classification > CHEMICAL SCIENCE (030000) > MACROMOLECULAR AND MATERIALS CHEMISTRY (030300) > Chemical Characterisation of Materials (030301)
Australian and New Zealand Standard Research Classification > EARTH SCIENCES (040000) > GEOCHEMISTRY (040200)
Divisions: Current > Schools > School of Earth, Environmental & Biological Sciences
Past > QUT Faculties & Divisions > Faculty of Science and Technology
Current > Institutes > Institute for Future Environments
Copyright Owner: Copyright 2015 The Author(s)
Copyright Statement: Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution
of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Published under licence by IOP Publishing Ltd
Deposited On: 19 Feb 2016 01:59
Last Modified: 25 Feb 2016 23:50

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