Development of porous metal oxide thin films by co-evaporation
(2007) Development of porous metal oxide thin films by co-evaporation . Applied Surface Science 253(11):4853 -4859.
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Abstract
This paper focuses on the development of mixed metal oxide thin films and physical characterization of the films. The films were produced by co-evaporation of titanium oxide and tungsten oxide powders. This allowed the development of titanium oxide–tungsten oxide films as analyzed using XPS. Examination in the SEM and AFM showed that the films were nanoporous with the pore size and pore orientation varying as a function of the deposition angle. UV–vis spectra of the films show an increase of transmittance with increasing deposition angle which is attributed to the structure and porosity of the films. Raman analysis indicated that the as-deposited films have broad and weak Raman characteristics, attributed to the nanocrystal nature of the films and the presence of defects, and the peak broadening deceases after annealing the film, as expected.
| Item Type: | Journal Article |
|---|---|
| Status: | Published |
| Keywords: | Metal oxide gas sensors; Oblique deposition; Co-evaporated TiO2–WO3 thin film; Surface characterization; Porosity |
| Subjects: | 290000 Engineering and Technology > 291400 Materials Engineering > 291499 Materials Engineering not elsewhere classified |
| ID Code: | 7669 |
| Deposited By: | Tesfamichael, Tuquabo |
| Deposited On: | 15 May 2007 |
| Alternative Locations: | http://dx.doi.org/10.1016/j.apsusc.2006.10.065 |
| Copyright Owner: | Copyright 2007 Elsevier |
| Additional Information: | For more information, please refer to the journal's website (see hypertext link) or contact the author. t.tesfamichael@qut.edu.au |