Composition of Ge(Si) Islands in the Growth of Ge on Si(111) by X-Ray Spectromicroscopy.
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Description
The stoichiometry of Ge/Si islands grown on Sis111d substrates at temperatures ranging from 460 to 560 degrees Celsius was investigated by x-ray photoemission electron microscopy sXPEEMd. By developing a specific analytical framework, quantitative information on the surface Ge/Si stoichiometry was extracted from laterally resolved XPEEM Si 2p and Ge 3d spectra, exploiting the chemical sensitivity of the technique. Our data show the existence of a correlation between the base area of the self-assembled islands and their average surface Si content: the larger the lateral dimensions of the 3D structures, the higher their relative Si concentration. The deposition temperature determines the characteristics of this relation, pointing to the thermal activation of kinetic diffusion processes.
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ID Code: | 4027 | ||
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Item Type: | Contribution to Journal (Journal Article) | ||
Refereed: | Yes | ||
ORCID iD: |
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Measurements or Duration: | 10 pages | ||
Keywords: | Se(Gi) Islands, X-Ray Spectromicroscopy | ||
DOI: | 10.1063/1.1832747 | ||
ISSN: | 0021-8979 | ||
Pure ID: | 34302825 | ||
Divisions: | Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering Past > QUT Faculties & Divisions > Science & Engineering Faculty Current > Research Centres > Australian Research Centre for Aerospace Automation |
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Copyright Owner: | Consult author(s) regarding copyright matters | ||
Copyright Statement: | This work is covered by copyright. Unless the document is being made available under a Creative Commons Licence, you must assume that re-use is limited to personal use and that permission from the copyright owner must be obtained for all other uses. If the document is available under a Creative Commons License (or other specified license) then refer to the Licence for details of permitted re-use. It is a condition of access that users recognise and abide by the legal requirements associated with these rights. If you believe that this work infringes copyright please provide details by email to qut.copyright@qut.edu.au | ||
Deposited On: | 04 May 2006 00:00 | ||
Last Modified: | 03 Mar 2024 06:47 |
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