Development of Porous Metal Oxide Thin Films by Co-evaporation
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Description
This paper focuses on the development of mixed metal oxide thin films and physical characterization of the films. The films were produced by co-evaporation of titanium oxide and tungsten oxide powders. This allowed the development of titanium oxide-tungsten oxide films as analyzed using XPS. Examination in the SEM and AFM showed that the films were nano-porous with the pore size and pore orientation varying as a function of the deposition angle. UV-Vis spectra of the films show an increase of transmittance with increasing deposition angle which is attributed to the structure and porosity of the films. Raman analysis indicated that the as-deposited films have broad and weak Raman characteristics, attributed to the nanocrystal nature of the films and the presence of defects, and the peak broadening deceases after annealing the film, as expected.
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| ID Code: | 5451 | ||||||
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| Item Type: | Contribution to Journal (Journal Article) | ||||||
| Refereed: | Yes | ||||||
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| Measurements or Duration: | 7 pages | ||||||
| Keywords: | Co-evaporation TiO2-WO3 Thin Film, Metal Oxide Gas Sensors, Oblique Deposition, Porosity, Suface Characterization | ||||||
| DOI: | 10.1016/j.apsusc.2006.10.065 | ||||||
| ISSN: | 0169-4332 | ||||||
| Pure ID: | 33708153 | ||||||
| Divisions: | Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering Past > Schools > School of Engineering Systems Past > QUT Faculties & Divisions > Faculty of Science and Technology Past > Schools > School of Physical & Chemical Sciences Past > QUT Faculties & Divisions > Science & Engineering Faculty Current > Research Centres > Australian Research Centre for Aerospace Automation |
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| Copyright Owner: | Consult author(s) regarding copyright matters | ||||||
| Copyright Statement: | This work is covered by copyright. Unless the document is being made available under a Creative Commons Licence, you must assume that re-use is limited to personal use and that permission from the copyright owner must be obtained for all other uses. If the document is available under a Creative Commons License (or other specified license) then refer to the Licence for details of permitted re-use. It is a condition of access that users recognise and abide by the legal requirements associated with these rights. If you believe that this work infringes copyright please provide details by email to qut.copyright@qut.edu.au | ||||||
| Deposited On: | 15 Mar 2007 00:00 | ||||||
| Last Modified: | 03 Mar 2024 15:00 |
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