Hydrogen gas sensing properties of Pt/Ta2O5 Schottky diodes based on Si and SiC substrates
Description
We developed Pt/tantalum oxide (Ta2O5) Schottky diodes for hydrogen sensing applications. Thin layer (4 nm) of Ta2O5 was deposited on silicon (Si) and silicon carbide (SiC) substrates using the radio frequency sputtering technique. We compared the performance of these sensors at different temperatures of 100 °C and 150 °C. At these operating temperatures, the sensor based on SiC exhibited a larger sensitivity, whilst the sensor based on Si exhibited a faster response toward hydrogen gas. We discussed herein, the experimental results obtained for these Pt/Ta2O5 based Schottky diodes exhibited that they are promising candidates for hydrogen sensing applications.
Impact and interest:
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| ID Code: | 59664 | ||
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| Item Type: | Contribution to Journal (Journal Article) | ||
| Refereed: | Yes | ||
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| Measurements or Duration: | 6 pages | ||
| Keywords: | Gas sensor, Hydrogen, RF sputtering, Schottky diode, Tantalum oxide | ||
| DOI: | 10.1016/j.sna.2011.02.021 | ||
| ISSN: | 0924-4247 | ||
| Pure ID: | 32065073 | ||
| Divisions: | Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering Past > Schools > School of Engineering Systems Past > QUT Faculties & Divisions > Science & Engineering Faculty |
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| Copyright Owner: | Consult author(s) regarding copyright matters | ||
| Copyright Statement: | This work is covered by copyright. Unless the document is being made available under a Creative Commons Licence, you must assume that re-use is limited to personal use and that permission from the copyright owner must be obtained for all other uses. If the document is available under a Creative Commons License (or other specified license) then refer to the Licence for details of permitted re-use. It is a condition of access that users recognise and abide by the legal requirements associated with these rights. If you believe that this work infringes copyright please provide details by email to qut.copyright@qut.edu.au | ||
| Deposited On: | 07 May 2013 23:24 | ||
| Last Modified: | 31 Mar 2024 20:13 |
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